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Influence of He Implantation Conditions on Strain Relaxation and Threading Dislocation Density in Si0.8Ge0-2 Virtual Substrates

Author(s):
Cai, J.
Mooney, P.M.
Christiansen, S.H.
Chen, H.
Chu, J.O.
Ott, J.A.
1 more
Publication title:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
809
Pub. date:
2004
Page(from):
51
Page(to):
56
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997592 [1558997598]
Language:
English
Call no.:
M23500/809
Type:
Conference Proceedings

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