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Reduced Pressure-Chemical Vapor Deposition of High Ge Content (20%-55%) SiGe Virtual Substrates

Author(s):
Bogumilowicz, Y.
Hartmann, J.M.
Laugier, F.
Rolland, G.
Billon, T.
Renard, V.
Olshanetsky, E.B.
Estibals, O.
Kvon, Z.D.
Portal, J.C.
5 more
Publication title:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
809
Pub. Year:
2004
Page(from):
45
Page(to):
50
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997592 [1558997598]
Language:
English
Call no.:
M23500/809
Type:
Conference Proceedings

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