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Structuring of Silicon Wafer Surfaces on the Sub-100 nm Scale by Hydrogen Plasma Treatments

Author(s):
Publication title:
Continuous nanophase and nanostructured materials : symposium held December 1-5, 2003, Boston, Masachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
788
Pub. date:
2004
Page(from):
571
Page(to):
576
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997264 [1558997261]
Language:
English
Call no.:
M23500/788
Type:
Conference Proceedings

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