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High-k ZrO2 Gate Dielectric on Strained-Si

Author(s):
Bhattacharya, S.
Samanta, S. K.
Chatterjee, S.
McCarthy, John
Armstrong, B. M.
Gamble, H. S.
Maiti, C. K.
Perova, T.
Moore, A.
4 more
Publication title:
Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
786
Pub. Year:
2004
Page(from):
159
Page(to):
164
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997240 [1558997245]
Language:
English
Call no.:
M23500/786
Type:
Conference Proceedings

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