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Precise Characterization of Silicon on Insulator (SOI) and Strained Silicon on Si1-xGex on Insulator (SSOI) Stacks With Spectroscopic Ellipsometry

Author(s):
Sun, Lianchao
Fouere, Jean-Claude
Defranoux, Christophe
Heinrich, Patrice
Reis, Christine Dos
Emeraud, Thierry
Piel, Jean-Philippe
Stehle, Jean-Louis
3 more
Publication title:
Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
786
Pub. date:
2004
Page(from):
103
Page(to):
108
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997240 [1558997245]
Language:
English
Call no.:
M23500/786
Type:
Conference Proceedings

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