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Effect of Piezoelectric Vibration on Electrical Properties of YSZ Film Prepared by MOCVD

Author(s):
Publication title:
Materials and devices for smart systems : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
785
Pub. date:
2004
Page(from):
93
Page(to):
100
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997233 [1558997237]
Language:
English
Call no.:
M23500/785
Type:
Conference Proceedings

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