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Ir Thin Films for PZT Capacitors Prepared by MOCVD Using a New Ir Precursor

Author(s):
Publication title:
Ferroelectric thin films XII : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
784
Pub. Year:
2004
Page(from):
269
Page(to):
274
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997226 [1558997229]
Language:
English
Call no.:
M23500/784
Type:
Conference Proceedings

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