Blank Cover Image

Adhesion Force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films

Author(s):
Publication title:
Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
782
Pub. Year:
2004
Page(from):
259
Page(to):
266
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997202 [1558997202]
Language:
English
Call no.:
M23500/782
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings The Surface Modification with Fluorocarbon Thin Films For the Prevention of Stiction in MEMS

Lee, Sang-Ho, Kwon, Myong-Jong, Park, Jin-Goo, Kim, Yong-Kweon, Shin, Hyung-Jae

MRS - Materials Research Society
7 Conference Proceedings The Adhesion of Pad Particles on Wafer Surfaces during Cu CMP

Song, Jae-Hoon, Han, Ja-Hyung, Hong, Yi-Koan, Kang, Young-Jae, Park, Jin-Goo, Maeng, Ju-Ho, Won, Young-Man

Materials Research Society
2 Conference Proceedings Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry

Lee, Kang-Kuk, Park, Jin-Goo, Shin, Hyung-Jae

MRS-Materials Research Society
8 Conference Proceedings Development and Optimization of Slurry for Ru CMP

In-Kwon Kim, Tae-Young Kwon, Jin-Goo Park, Hyung-Soon Park

Materials Research Society
3 Conference Proceedings Fundamentals of Post-CMP Cleaning

Jin-Goo Park, Tae-Gon Kim

Materials Research Society
9 Conference Proceedings Residual Ion Implantation Damage at Source/Drain Junctions of Excimer Laser Annealed Polycrystalline Silicon Thin Film Transistor

Park, Kee-Chan, Kim, Jae-Shin, Nam, Woo-Jin, Han, Min-Koo

Materials Research Society
4 Conference Proceedings Characterization of (Ba,Sr)RuO3 Films Deposited by Metal-Organic Chemical Vapor Deposition

Choi, Duck-Kyun, Kang, Joong-Seo, Kim, Young-Bae, Hong, Duck-Hwa, Kim, Hyun-Chul, Kim, Sung-Tae, Yoo, Cha-Young

Materials Research Society
10 Conference Proceedings Device Characteristics of a Polysilicon Thin-Film Transistor Fabricated by MILC at Low Temperature

Lee, Seok-Woon, Lee, Byung-Il, Ihn, Tae-Hyung, Kim, Tae-Kyung, Kang, Young-Tae, Joo, Seung-Ki

MRS - Materials Research Society
5 Conference Proceedings Simulations of the Pressurizer Safety Valve Stuck Open Accident for the Development of the Accident Sequences in the Low Power/Shutdown PSA

Ho-Gon Lim, Jin-Hee Park, Seung-Chul Jang, Tae-Woon Kim

American Society of Mechanical Engineers
11 Conference Proceedings Effects of Impurities on the Crystallization and Grain Growth of Polycrystalline Si Films

Paik, Jae-Cheol, Park, Kwang-Hyun, Choi, Woon, Nam, Seung-Eui, Kim, Hyoung-June

MRS - Materials Research Society
6 Conference Proceedings Frictional Behavior and Particle Adhesion of Abrasive Particles during Cu CMP

Hong, Yi-Koan, Han, Ja-Hyung, Song, Jae-Hoon, Park, Jin-Goo

Materials Research Society
12 Conference Proceedings Physical and Chemical Characterization of Re-Used Oxide CMP Slurry

Kim, Hyung-Joon, Fom, Dae-Hong, Kim, Myoung-Shik, Park, Jin-Goo

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12