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MIM Capacitors With HfO2 and HfAlOx for Si RF and Analog Applications

Author(s):
Yu, Xiongfei
Zhu, Chunxiang
Hu, Hang
Chin, Albert
Li, M. F.
Cho, B. J.
Kwong, Dim-Lee
Foo, P. D.
Yu, M. B.
4 more
Publication title:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
766
Pub. Year:
2003
Page(from):
357
Page(to):
362
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997035 [1558997032]
Language:
English
Call no.:
M23500/766
Type:
Conference Proceedings

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