Development and Application of On-Wafer Small Angle X-ray Scattering for the Quantification of Pore Morphology in Low-k Porous SiLKTM Semiconductor Dielectrics

Development and Application of On-Wafer Small Angle X-ray Scattering for the Quantification of Pore Morphology in Low-k Porous SiLKTM Semiconductor Dielectrics

Author(s):

Landes, Brian

Publication title:

Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

766

Pub. Year:

2003

Page(from):

209

Page(to):

216

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997035 [1558997032]

Language:

English

Call no.:

M23500/766

Type:

Conference Proceedings

Details

TDL ID:	ZA00014424
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Conf. info. (Number):	2003
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2003.04.21-2003.04.25

Similar Items:

1 Conference Proceedings Design of Nanoporous Polyarylene Polymers for Use as Low-k Dielectrics in Microelectronic Devices Silvis, H. Craig, Bouck, Kevin J., Godschalx, James P., Niu, Q. Jason, Radler, Michael J., Stokich, Ted M., Lyons, John … American Chemical Society	7 Technical Paper Quantifying and Reducing the Effect of Contamination on Rolling Bearing Fatigue Life Losche,Thomas, Weigand,Michael Society of Automotive Engineering, Inc.
2 Conference Proceedings Development of Porous SiLKTM Semiconductor Dielectric Resin for the 65 nm and 45 nm Nodes Strittmatter, R. J., Hahnfeld, J. L., Silvis, H. C., Stokich, T. M., Perry, J. D., Ouellette, K. B., Niu, Q. J., … Materials Research Society	8 Technical Paper You make the call...nitrogen gas springs or manifold systems Bibbee, Steve, Rau, Jerry Society of Manufacturing Engineers
3 Technical Paper A Comparison of Gasoline Direct Injection Systems and Discussion of Development Techniques Fry,Mike, King,Jason, White,Carl Society of Automotive Engineers	9 Conference Proceedings Methods and Benefits of Laboratory Calibrations of Compressible Fluid Flowmeters Caldwell, Steve, Lewis, Mike American Institute of Chemical Engineers
4 Technical Paper A comparison of gasoline direct injection systems and discussion of development techniques Fry, Mike, King, Jason, White, Carl Society of Automotive Engineers	10 Technical Paper Automation of Tool Routines & Analysis for 3D Measurement Systems Nichols, Steve, Richey, Mike Society of Automotive Engineers
5 Conference Proceedings 1. Environmental Aspects of Hydraulic Fracturing: What Are the Facts? George E. King, Danny Durham American Chemical Society	11 Conference Proceedings (456b) Solute Solubility Parameter Determination Using Supercritical Fluids Jerry W. King American Institute of Chemical Engineers
6 Conference Proceedings Stacked Packaging Techniques for Use in Hearing Aid Applications Paczkowski,Ted, Erickson,Mike SPIE - The International Society for Optical Engineering, IMAPS	12 Conference Proceedings Coupled Processing Options for Agricultural Materials Using Supercritical Fluid Carbon Dioxide King, Jerry W. American Chemical Society

1

2

3

4

5

6

7

8

9

10

11

12