Some Aspects of the Materials Science of Low-k Integration

Some Aspects of the Materials Science of Low-k Integration

Author(s):: McGahay, Vincent
Publication title:: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 766
Pub. Year:: 2003
Page(from):: 47
Page(to):: 58
Pages:: 12
Pub. info.:: Warrendale, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9781558997035 [1558997032]
Language:: English
Call no.:: M23500/766
Type:: Conference Proceedings

Details

TDL ID:	ZA00014424
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Conf. info. (Number):	2003
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2003.04.21-2003.04.25

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