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Experiment and Modelization Results on Laser Thermal Processing for Ultra-Shallow Junction Formation: Influence of Laser Pulse Duration

Author(s):
Venturini, J.
Hernandez, M.
Zahorski, D.
Kerrien, G.
Sarnet, T.
Debarre, D.
Boulmer, J.
Laviron, C.
Semeria, M. -N.
Camel, D.
Santailler, J. -L.
6 more
Publication title:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
765
Pub. date:
2003
Page(from):
255
Page(to):
260
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997028 [1558997024]
Language:
English
Call no.:
M23500/765
Type:
Conference Proceedings

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