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Indium in Silicon: A Study on Diffusion and Electrical Activation

Author(s):
Scalese, S.
Magna, A. La
Mannino, G.
Privitera, V.
Bersani, M.
Giubertoni, D.
Solmi, S.
Pichler, P.
3 more
Publication title:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
765
Pub. Year:
2003
Page(from):
205
Page(to):
210
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997028 [1558997024]
Language:
English
Call no.:
M23500/765
Type:
Conference Proceedings

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