Blank Cover Image

High-k Materials for Advanced Gate Stack Dielectrics: A Comparison of ALCVD and MOCVD as Deposition Technologies

Author(s):
Caymax, Matty
Bender, H.
Brijs, B.
Conard, T.
Gendt, S. De
Delabie, A.
Heyns, M.
Onsia, B.
Ragnarsson, L.
Richard, O.
Vandervorst, W.
Elshocht, S. Van
Zhao, C.
Maes, J. W.
Date, L.
Pique, D.
Young, E.
Tsai, W.
Shimamoto, Y.
14 more
Publication title:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
765
Pub. date:
2003
Page(from):
47
Page(to):
58
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997028 [1558997024]
Language:
English
Call no.:
M23500/765
Type:
Conference Proceedings

Similar Items:

De Gendt, S., Beckx, S., Caymax, M., Claes, M., Conard, T., Delabie, A., Deweerd, W., Hellin, D., Kraus, H., Onsia, B., …

Electrochemical Society

Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., …

Materials Research Society

Kaushik, V., De Gendt, S., Caymax, M., Young, E., Rohr, E., Van Elshocht, S., Delabie, A., Claes, M., Shi, X., Chen, I., …

Electrochemical Society

Elshocht, S.Van, Brijs, B., Caymax, M., Conard, T., Gendt, S.De, Kubicek, S., Meuris, M., Onsia, B., Richard, O., …

Materials Research Society

De Gendt, S., Brunco, D., Caymax, M., Canard, T., Date, L., Delabie, A., Deweerd, W., Groeseneken, G., Houssa, M., Hyun, …

Electrochemical Society

Elshocht, S. Van, Carter, R., Caymax, M., Claes, M., Conard, T., Date, L., Gendt, S. De, Kaushik, V., Kerber, A., Kluth, …

Materials Research Society

Elshocht, S.Van, Caymax, M., Gendt, S.De, Conard, T., Petry, J., Claes, M., Witters, T., Zhao, C., Brijs, B., Richard, …

Materials Research Society

A. Debbie, M. Caymax, S. Brijs, D. Brunco, T. Conard, E. Sleeckx, L. Ragnarsson, S. Van Elshocht, S. De Gendt, M. Heyns

Electrochemical Society

Vandervorst, W., Brijs, B., Bender, H., Conard, O.T., Petry, J., Richard, O., Elshocht, S.Van, Delabie, A., Caymax, M., …

Materials Research Society

Kaushik, V.S., Gendt, S.De, Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., Cartier, …

Materials Research Society

6 Conference Proceedings ALD HfO2 Surface Preparation Study

Delabie, Annelies, Caymax, M., Maes, J.W., Bajolet, P., Brijs, B., Cartier, E., Conard, T., Gendt, S.De, Richard, O., …

Materials Research Society

Kaushik, V. S., DeGendt, S., Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., …

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12