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Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz

Author(s):
Aguas, H.
Raniero, L.
Pereira, L.
Fortunato, E.
Cabarrocas, P. Roca i
Martins, R.
1 more
Publication title:
Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
762
Pub. date:
2003
Page(from):
589
Page(to):
594
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996991 [1558996990]
Language:
English
Call no.:
M23500/762
Type:
Conference Proceedings

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