Performance of Thin-Film Silicon MEMS Resonators in Vacuum
- Author(s):
- Publication title:
- Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 762
- Pub. Year:
- 2003
- Page(from):
- 151
- Page(to):
- 156
- Pages:
- 6
- Pub. info.:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996991 [1558996990]
- Language:
- English
- Call no.:
- M23500/762
- Type:
- Conference Proceedings
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