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Ferroelectric Oxide Single-Crystalline Layers by Wafer Bonding and Hydrogen/Helium Implantation

Author(s):
Publication title:
Ferroelectric thin films XI : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
748
Pub. Year:
2003
Page(from):
337
Page(to):
342
Pages:
6
Pub. info.:
Warrendale, Pa: Materials Research Society
ISSN:
02729172
ISBN:
9781558996854 [1558996850]
Language:
English
Call no.:
M23500/748
Type:
Conference Proceedings

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