Study of Poly-Si/TaSiN/Pt Structure for Stacked Capacitors

Study of Poly-Si/TaSiN/Pt Structure for Stacked Capacitors

Author(s):

Letendu, F.

Publication title:

Ferroelectric thin films XI : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

748

Pub. Year:

2003

Page(from):

13

Page(to):

18

Pages:

6

Pub. info.:

Warrendale, Pa: Materials Research Society

ISSN:

02729172

ISBN:

9781558996854 [1558996850]

Language:

English

Call no.:

M23500/748

Type:

Conference Proceedings

Details

TDL ID:	ZA00014408
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	11th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.05

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