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Fabrication of MISFET Exhibiting Normally-Off Characteristics Using a Single-Crystalline InGaO3(ZnO)5 Thin Film

Author(s):
Nomurs, K.
Ohta, H.
Ueda, K.
Kamiya, T.
Hirano, M.
Hosono, H.
1 more
Publication title:
Crystalline oxide-silicon heterostructures and oxide optoelectronics : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
747
Pub. Year:
2003
Page(from):
267
Page(to):
274
Pages:
8
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996847 [1558996842]
Language:
English
Call no.:
M23500/747
Type:
Conference Proceedings

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