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Structural Quality and Electrical Behavior of Epitaxial High-k Y2O3/Si(001)

Author(s):
Vellianitis, G.
Apostolopoulos, G.
Dimoulas, A.
Argyropoulos, K.
Mereu, B.
Scholz, R.
Alexe, M.
Hooker, J. C.
3 more
Publication title:
Crystalline oxide-silicon heterostructures and oxide optoelectronics : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
747
Pub. date:
2003
Page(from):
177
Page(to):
182
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996847 [1558996842]
Language:
English
Call no.:
M23500/747
Type:
Conference Proceedings

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