Blank Cover Image

A Study of Al2O3:C Films on Si(100) Grown by Low Pressure MOCVD

Author(s):
Publication title:
Crystalline oxide-silicon heterostructures and oxide optoelectronics : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
747
Pub. Year:
2003
Page(from):
159
Page(to):
164
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996847 [1558996842]
Language:
English
Call no.:
M23500/747
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A Study of Al2O3:C Films on Si(100) Grown by Low Pressure MOCVD

Singh, M.P., Thakur, C.S., Bhat, N., Shivashankar, S.A.

Materials Research Society
7 Conference Proceedings Ellipsometry as a Sensitive Technique to Probe Film-Substrate Interfaces: Al2O3 on Si(100)

Singh, M.P., Raghavan, G., Tyagi, A.K., Shivashankar, S.A.

Materials Research Society
2 Conference Proceedings Crack Formation Due to Annealing of Al2O3 Films Grown on Si(100) by MOCVD

Singh, M.P., Shivashankar, S.A.

Materials Research Society
8 Conference Proceedings A Study of Nucleation and Growth in MOCVD: The Growth of Thin Films of Alumina

Singh, M.P., Mukhopadhayay, S., Devi, Anjana, Shivashankar, S.A.

Materials Research Society
3 Conference Proceedings Characterization of a Potential Gate Dielectric: MOCVD-Grown Erbium Oxide on Silicon

Singh, M.P., Thakur, C.S., Shalini, K., Bhat, N., Shivashankar, S.A.

Electrochemical Society
9 Conference Proceedings Effect of Nature of the Precursor on Crystallinity and Microstructure of MOCVD-Grown ZrO2 Thin Films

Dharmaprakash, M.S., Shivashankar, S.A.

Materials Research Society
4 Conference Proceedings Strongly Oriented Thin Films of Er2O3 Grown on Fused Quartz by Low-Pressure MOCVD

Singh, M.P., Shalini, K., Shivashankar, S.A.

Electrochemical Society
10 Conference Proceedings Compare low pressure MOCVD growth, I-V, C-V, and annealing characteristics of Gd2O3, Er2O3.

Singh

Electrochemical Society
5 Conference Proceedings Aluminium Oxide Thin Film Grown by Low Pressure MOCVD Using Aluminium Acetylacetone and Nitrous Oxide

Singh, M.P., Shripathi, I., Shivashankar, S.A.

Electrochemical Society
11 Conference Proceedings Time Evolution of the Microstructure of VO2(B) Films Deposited on Glass by MOCVD

Sahana, M.B., Subbanna, G.N., Shivashankar, S.A.

Materials Research Society
6 Conference Proceedings Structural and Electrical Properties of Er2O3 Thin Films Deposited by RF Sputtering for Gate Dielectric Applications

G. C. Deepak, N. Bhat, S. A. Shivashankar

Electrochemical Society
12 Conference Proceedings MOCVD of ZrO2 Thin Films from Two Different β-Diketonate Precursors: Dependence of Microstructure and Growth Kinetics on the Precursor

Dharmaprakash, M.S., Shivashankar, S.A.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12