Study of Interface Formation of (Ba,Sr)TiO3 Thin Films Grown by RF Sputter Deposition on Bare Si and Thermal SiO2/Si Substrates

Study of Interface Formation of (Ba,Sr)TiO3 Thin Films Grown by RF Sputter Deposition on Bare Si and Thermal SiO2/Si Substrates

Author(s):

Publication title:

Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

745

Pub. Year:

2003

Page(from):

373

Page(to):

378

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996823 [1558996826]

Language:

English

Call no.:

M23500/745

Type:

Conference Proceedings

Details

TDL ID:	ZA00014405
Series ID:	PA00000011
Conf. info. (Name):	Symposium on novel materials and processes for advances CMOS
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.04

Similar Items:

1 Conference Proceedings Study of Interface Formation of (Ba,Sr)TiO3 Thin Films Grown by rf Sputter Deposition on Bare Si and Thermal SiO2/Si Substrates Suvorova, N. A., Mueller, A. H., Suvorova, A. A., Saunders, M., Irene, E. A. Materials Research Society	7 Conference Proceedings RF Magnetron Sputtering Epitaxially Grown (Pb,La)TiO3 Thin Films on (0001) Al2O3 and (001) SrTiO3 for Nonlinear Optical Applications Rabibisoa, U., Agius, B. MRS - Materials Research Society
2 Conference Proceedings PRE-OXIDATION ANNEAL KINETICS: INTERFACE DEGRADATION OF THIN SiO2 FILMS ON SILICON Poler, J.C., Irene, E.A. Materials Research Society	8 Conference Proceedings Reactive Sputtering Deposition of Photocatalytic TiO₂ Thin Films on Glass Substrates C.J. Tavares, J. Vieira, L. Rebouta, G. Hungerford, P. Coutinho Society of Vacuum Coaters
3 Conference Proceedings A Measurement of the Refractive Index of Ultrathin SiO2 Films and a Reevaluation of the Thermal Si Oxidation Kinetics in the Thin Film Regime Hebert, K.J., Labayen, T., Irene, E.A. Electrochemical Society	9 Conference Proceedings Microwave Properties of Parallel Plate Capacitors Based on (Ba,Sr)TiO3 Thin Films Grown on SiO2/Al2O3 Substrates Koutsaroff, I. P., Bernacki, T., Zelner, M., Cervin-Lawry, A., Kassam, A., Woo, P., Woodward, L., Patel, A. Materials Research Society
4 Conference Proceedings In Situ Real-Time Studies of Oxygen Incorporation in Complex Oxide Thin Films Using Spectroscopic Ellipsometry and Ion Scattering and Recoil Spectrometry Mueller, A.H., Gao, Y., Irene, E.A., Auciello, O., Krauss, A.R., Schultz, J.A. Materials Research Society	10 Conference Proceedings Si/SiO2 INTERFACE STUDIES BY IMMERSION ELLIPSOMETRY Liu, Q., Irene, E. A. MRS - Materials Research Society
5 Conference Proceedings EPITAXIAL WAVEGUIDING KNbO3 THIN FILMS GROWN BY RF-SPUTTER DEPOSITION Thony, Silvia Schwyn MRS - Materials Research Society	11 Conference Proceedings Optical Properties of Anatase, Rutile and Amorphous Phases of TiO2 Thin Films Grown at Room Temperature by RF Magnetron Sputtering Naik, V.M., Haddad, D., Naik, R., Benci, J., Auner, G.W. Materials Research Society
6 Conference Proceedings In Situ Real-Time Ellipsometry Study of Dynamic Processes of YBa2Cu3O7-x Thin Films Gao, Y., Mueller, A. H., Irene, E. A., Auciello, O., Krauss, A. R., Schultz, J. A. MRS - Materials Research Society	12 Conference Proceedings Influence of Deposition Time on Properties of the RF Sputtered TiO₂ Thin Films F. Chaabouni, L.C. Costa, M. Selmi, M. Abaab, B. Rezig Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12