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Structural Quality and Electrical Behavior of Epitaxial High-k Y2O3/Si(001)

Author(s):
Vellianitis, G.
Apostolopoulos, G.
Dimoulas, A.
Argyropoulos, K.
Mereu, B.
Scholz, R.
Alexe, M.
Hooker, J.C.
3 more
Publication title:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
745
Pub. date:
2003
Page(from):
367
Page(to):
372
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
Language:
English
Call no.:
M23500/745
Type:
Conference Proceedings

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