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Growth and Physical Properties of MOCVD-Deposited Hafnium Oxide Films and Their Properties on Silicon

Author(s):
Elshocht, S.Van
Caymax, M.
Gendt, S.De
Conard, T.
Petry, J.
Claes, M.
Witters, T.
Zhao, C.
Brijs, B.
Richard, O.
Bender, H.
Vandervorst, W.
Carter, R.
Kluth, J.
Date, L.
Pique, D.
Heyns, M.M.
12 more
Publication title:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
745
Pub. Year:
2003
Page(from):
197
Page(to):
202
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
Language:
English
Call no.:
M23500/745
Type:
Conference Proceedings

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