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ALD HfO2 Surface Preparation Study

Author(s):
Delabie, Annelies
Caymax, M.
Maes, J.W.
Bajolet, P.
Brijs, B.
Cartier, E.
Conard, T.
Gendt, S.De
Richard, O.
Vandervorst, W.
Zhao, C.
Green, M.
Tsai, W.
Heyns, M.M.
9 more
Publication title:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
745
Pub. date:
2003
Page(from):
179
Page(to):
184
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
Language:
English
Call no.:
M23500/745
Type:
Conference Proceedings

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