Blank Cover Image

Physical-Chemical Evolution Upon Thermal Treatments of Al2O3, HfO2 and Al/Hf Composite Materials Deposited by ALCVDTM

Author(s):
Crivelli, B.
Alessandri, M.
Alberici, S.
Cazzaniga, F.
Dekadjevi, D.
Maes, J.W.
Ottaviani, G.
Pavia, G.
Queirolo, G.
Santucci, S.
Zanderigo, F.
6 more
Publication title:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
745
Pub. date:
2003
Page(from):
149
Page(to):
154
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996823 [1558996826]
Language:
English
Call no.:
M23500/745
Type:
Conference Proceedings

Similar Items:

Crivelli, B., Alessandri, M., Alberici, S., Brazzelli, D., Elbaz, A. C., Frabboni, S., Ghidini, G., Maes, J. W., …

Materials Research Society

Caricato, A. P., Cazzaniga, F., Cerofolini, G. F., Crivelli, B., Polignano, M. L., Tallarida, G., Valeri, S., Zonca, R.

MRS - Materials Research Society

Climent, M., Crivelli, B., Righini, G., Alberici, S., Alessandri, M., Elbaz, A.C., Pavia, G., Wiemer, C.

Materials Research Society

8 Conference Proceedings High-k Materials in Flash Memories

M. Alessandri, R. Piagge, S. Alberici, E. Bellandi, M. Caniatti, G. Ghidini, A. Modelli, G. Pavia, E. Ravizza, A. …

Electrochemical Society

A. Piagge, M. Caniatti, A. Del Vitto, C. Wiemer, G. Pavia, S. Alberici, E. Bellandi, A. Nale, M. Alessandri

Electrochemical Society

Alessandri, M., Bellandi, E., Pipia, F., Crivelli, B., Wolke, K., Schenkl, M.

Electrochemical Society

Polignano, M. L., Brambilla, M., Cazzaniga, F., Pavia, G., Zanderigo, F., Spiga, S., Moro, L., Castaldini, A., …

MRS - Materials Research Society

Sabbadini, A., Cazzaniga, F., Brambilla, M., Bresolin, C., Cusi, V., Marangon, T., Queirolo, G.

MRS - Materials Research Society

Sassela, A., Borghesi, A., Amore, G., Tallarida, G., Spiga, S., Cazzaniga, F., Ferroni, G., Queirolo, G.

Electrochemical Society

Polignano,M.L., Bresolin,C., Cazzaniga,F., Sabbadini,A., Queirolo,G.

SPIE-The International Society for Optical Engineering

Zonca, R., Crivelli, B., Polignano, M. L., Cazzaniga, F., Alessandri, M., Caricato, A. P., Bersani, M., Sbetti, M., …

MRS-Materials Research Society

Meinardi, F., Quilici, S., Moro, L., Queirolo, G., Sabbadini, A.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12