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Surface Passivation of AlGaN Terminated and GaN Terminated HEMT Structures Studied by XPS

Author(s):
Gila, B.P.
Lambers, E.
Luo, B.
Onstine, A.H.
Allums, K.K.
Abernathy, C.R.
Ren, F.
Pearton, S.J.
3 more
Publication title:
GaN and related alloys - 2002 : symposium held December 2-6, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
743
Pub. date:
2002
Page(from):
767
Page(to):
772
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996809 [155899680X]
Language:
English
Call no.:
M23500/743
Type:
Conference Proceedings

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