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Whole-Wafer Optical Mapping of Defects in Insulating Silicon Carbide Wafers

Author(s):
Mier, Millard G.
Boeckl, John J.
Hill, David A.
Bertrand, Scott D.
Ramakrishnan, Easwar
Roth, Matthew D.
Balkas, Cengiz
Nelson, Matthew P.
3 more
Publication title:
Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
742
Pub. date:
2003
Page(from):
127
Page(to):
130
Pages:
4
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996793 [1558996796]
Language:
English
Call no.:
M23500/742
Type:
Conference Proceedings

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