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Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Author(s):
Espinosa, H.D.
Peng, B.
Kim, K.-H.
Prorok, B.C.
Moldovan, N.
Xiao, X.C.
Gerbi, J.E.
Birrell, J.
Auciello, O.
Carlisle, J.A.
Gruen, D.M.
Mancini, D.C.
7 more
Publication title:
Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
741
Pub. date:
2003
Page(from):
213
Page(to):
218
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996786 [1558996788]
Language:
English
Call no.:
M23500/741
Type:
Conference Proceedings

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