Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications

Growth of Polycrystalline Silicon Carbide on Thin Polysilicon Sacrificial Layers for Surface Micromachining Applications

Author(s):

Publication title:

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

741

Pub. Year:

2003

Page(from):

67

Page(to):

72

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996786 [1558996788]

Language:

English

Call no.:

M23500/741

Type:

Conference Proceedings

Details

TDL ID:	ZA00014401
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.04

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