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Silicon-on-Insulator substrates with buried ground planes (GPSOI)

Author(s):
Bain, M.
Stefanos, S.
Baine, P.
Loh, S.H.
Jin, M.
Montgomery, J.H.
Armstrong, B.M.
Gamble, H.S.
Hamel, J.
McNeill, D. W.
Kraft, M.
Kemhadjian, H.A.
7 more
Publication title:
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
185
Pub. date:
2005
Page(from):
273
Page(to):
278
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402030116 [1402030118]
Language:
English
Call no.:
N17050/185
Type:
Conference Proceedings

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