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Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.

Author(s):
Bain, M.F.
Baine, P.
McNeill, D.W.
Srinivasan, G.
Jankovic, N.
McCartney, J.
Moore, R.A.
Armstrong, B.M.
Gamble, H.S.
4 more
Publication title:
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
185
Pub. date:
2005
Page(from):
103
Page(to):
108
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402030116 [1402030118]
Language:
English
Call no.:
N17050/185
Type:
Conference Proceedings

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