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Smart Cut Technology: the path for advanced SOI substrates

Author(s):
Moriceau, H.
Lagahe-Blanchard, C.
Fournel, F.
Pocas, S.
Jalaguier, E.
Perreau, P.
Deguet, C.
Ernst, T.
Beaumont, A.
Kernevez, N.
Hartman, J.M.
Ghyselen, B.
Aulnette, C.
Letertre, F.
Rayssac, O.
Faure, B.
Richtarch, C.
Cayrefourq, I.
13 more
Publication title:
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
185
Pub. date:
2005
Page(from):
39
Page(to):
52
Pages:
14
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402030116 [1402030118]
Language:
English
Call no.:
N17050/185
Type:
Conference Proceedings

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