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Micro/Nanoscale Tribology of MEMS Materials, Lubricants and Devices

Author(s):
Publication title:
Fundamentals of tribology and bridging the gap between the macro- and micro/nanoscales
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
10
Pub. Year:
2001
Page(from):
821
Page(to):
850
Pages:
30
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9780792368366 [0792368363]
Language:
English
Call no.:
N17050/10
Type:
Conference Proceedings

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