Micro/Nanoscale Tribology of MEMS Materials, Lubricants and Devices
- Author(s):
- Publication title:
- Fundamentals of tribology and bridging the gap between the macro- and micro/nanoscales
- Title of ser.:
- NATO science series. Series 2, Mathematics, physics and chemistry
- Ser. no.:
- 10
- Pub. Year:
- 2001
- Page(from):
- 821
- Page(to):
- 850
- Pages:
- 30
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9780792368366 [0792368363]
- Language:
- English
- Call no.:
- N17050/10
- Type:
- Conference Proceedings
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