Influence of Interfacial Neighborhood on Residual Stress due to Deposition of TiN Thin Films Made by PVD

Influence of Interfacial Neighborhood on Residual Stress due to Deposition of TiN Thin Films Made by PVD

Author(s):

Publication title:

Residual stresses VII : ICRS 7 : proceedings of the 7th International Conference on Residual Stresses, ICRS-7 Xi'an, China, 14-17, June, 2004

Title of ser.:

Materials science forum

Ser. no.:

490-491

Pub. Year:

2005

Page(from):

601

Page(to):

606

Pages:

6

Pub. info.:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499694 [0878499695]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014245
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Residual Stresses : ICRS
Conf. info. (Number):	7th
Conf. info. (Venue):	Xi'an, China
Conf. info. (Date):	2004.06.14-2004.06.17

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