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Evolution of Defect and Hydrogen-Related Low Temperature Photoluminescence Spectra with Annealing for Hydrogen or Helium Implanted 6H SiC

Author(s):
Yan, F.
Devaty, R. P.
Choyke, W. J.
Gali, A.
Schmid, F.
Pensl, G.
Wagner, G.
2 more
Publication title:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
Title of ser.:
Materials science forum
Ser. no.:
483-485
Pub. date:
2005
Page(from):
493
Page(to):
496
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499632 [0878499636]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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