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Study of Ion Induced Damage in 4H-SiC

Author(s):
Giudice, A. Lo
Olivero, P.
Fizzotti, F.
Manfredotti, C.
Vittone, E.
Bianco, S.
Bertuccio, G.
Casiraghi, R.
Jaksic, M.
4 more
Publication title:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
Title of ser.:
Materials science forum
Ser. no.:
483-485
Pub. date:
2005
Page(from):
389
Page(to):
392
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499632 [0878499636]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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