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Modification of the Oxide/Semiconductor Interface by High Temperature NO Treatments: A Combined EPR, NRA and XPS Study on Oxidized Porous and Bulk n-Type 4H-SiC

Author(s):
Bardeleben, H. J. von
Cantin, J. L.
Vickridge, I.
Song, Y.
Dhar, S.
Feldman, L. C.
Williams, J. R.
Ke, L.
Shishkin, Y.
Devaty, R. P.
Choyke, W. J.
6 more
Publication title:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
Title of ser.:
Materials science forum
Ser. no.:
483-485
Pub. date:
2005
Page(from):
277
Page(to):
282
Pages:
6
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499632 [0878499636]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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