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Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor

Author(s):
Burk, A. A.
O'Loughlin, M. J.
Paisley, M. J.
Powell, A. R.
Brady, M. F.
Leonard, R. T.
Muller, S. G.
Allen, S. T.
3 more
Publication title:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
Title of ser.:
Materials science forum
Ser. no.:
483-485
Pub. Year:
2005
Page(from):
137
Page(to):
140
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499632 [0878499636]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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