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Increased Growth Rate in a SiC CVD Reactor Using HCI as a Growth Additive

Author(s):
Myers, R.
Kordina, O.
Shishkin, Z.
Rao, S.
Everly, R.
Saddow, S. E.
1 more
Publication title:
Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
Title of ser.:
Materials science forum
Ser. no.:
483-485
Pub. date:
2005
Page(from):
73
Page(to):
76
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499632 [0878499636]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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