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Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Author(s):
Pernas, P. L.
Ruiz, E.
Garrido, J.
Piqueras, J.
Paszti, F.
Climent-Font, A.
Lifante, G.
Cantelar, E.
3 more
Publication title:
Cross-disciplinary applied research in materials science and technology : proceedings of the 1st International Meeting on Applied Physics (APHYS-2003), Badajoz, Spain, October 13th-18th 2003
Title of ser.:
Materials science forum
Ser. no.:
480-481
Pub. Year:
2005
Page(from):
149
Page(to):
154
Pages:
6
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499625 [0878499628]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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