Blank Cover Image

High-Quality Semiconductor Carbon-Doped β-FeSi2 Film Synthesized by MEVVA Ion Implantation

Author(s):
Publication title:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China
Title of ser.:
Materials science forum
Ser. no.:
475-479(5)
Pub. Year:
2005
Page(from):
3803
Page(to):
3806
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499601 [0878499601]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Photoluminescence and Electroluminescence Properties of FeSi2-Si Structures Formed by MEVVA Implantation

Chow, C.F., Gao, Y., Wong, S.P., Ke, N., Li, Q., Cheung, W.Y., Shao, G., Lourenco, M.A., Homewood, K.P.

Materials Research Society
7 Conference Proceedings Ion-Beam Synthesis of SiC/Si Heterostructures by MEVVA Implantation

Wong, S. P., Ho, L. C., Chen, Dihu, Guo, W. S., Yan, H., Kwok, R. W. M.

MRS - Materials Research Society
2 Conference Proceedings Field Emission Properties of Ion-Beam Synthesized SiC/Si Heterostructures by MEVVA Implantation

Chen, Dihu, Wong, S. P., Cheung, W. Y., Luo, E. Z., Wu, W., Xu, J. B., Wilson, I. H., Kwok, R. W. M.

MRS - Materials Research Society
8 Conference Proceedings Ion-Beam Synthesis of SiC/Si Heterostructures by MEVVA Implantation

Wong, S. P., Ho, L. C., Chen, Dihu, Guo, W. S., Yan, H., Kwok, R. W. M.

MRS - Materials Research Society
3 Conference Proceedings Structures and light emission properties of ion beam synthesized FeSi2 in silicon

Chow, C. F., Gao, Y., Wang, S. P., Ke, N., Li, Q., Cheung, W. Y., Shao, G., Lourenco, M. A., Homewood, K. P.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Structural and optical properties of Si/β-FeSi2/Si heterostructures fabricated by Fe ion implantation and Si MBE

N. G. Galkin, E. A. Chusovitin, D. L. Goroshko, R. M. Bayazitov, R. I. Batalov, T. S. Shamirzaev, A. K. Gutakovsriy, K. …

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation

Wong, S. P., Peng, Qicai, Cheung, W. Y., Guo, W. S., Xu, J. B., Wilson, I. H., Hark, S. K., Morton, R., Lau, S. S.

MRS - Materials Research Society
10 Conference Proceedings DOPING OF C60 FILMS USING HIGH ENERGY BORON ION IMPLANTATION

Ren, Zhong-Min, Du, Yuan-Cheng, Xiong, Xia-Xing, Ying, Zhi-Feng, Li, Fu-Ming, Xu, Xing-Long

MRS - Materials Research Society
5 Conference Proceedings Formation and Characteristics of CoSi2 Layers Synthesized by MEVVA Implantation

Wong, S. P., Peng, Qical, Cheung, W. Y., Guo, W. S., Xu, J. B., Wilson, I. H., Hark, S. K., Morton, R., Lau, S. S.

MRS - Materials Research Society
11 Conference Proceedings Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Chen, Dihu, Wong, S. P., Ho, L. C., Yan, H., Kwok, R. W. M.

MRS - Materials Research Society
6 Conference Proceedings FORMATION OF BURIED α- AND β-FeSi2 IN (100) Si BY HIGH DOSE ION IMPLANTATION

Maex, K., Lauwers, A., Van Hove, M., Vandervorst, W., Van Rossum, M.

Materials Research Society
12 Conference Proceedings Formation of High Quality β-FeSi2 by Pre-Amorphization-Enhanced Diffusion

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T., Miyao, M.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12