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Laser Doping and Recrystallization for Amorphous Silicon Films by Plasma-Enhanced Chemical Vapor Deposition

Author(s):
Wuu, D. S.
Lien, S. Y.
Wang, J. H.
Mao, H. Y.
Hsieh, I. C.
Wu, B. R.
Yao, P. C.
2 more
Publication title:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China
Title of ser.:
Materials science forum
Ser. no.:
475-479(5)
Pub. Year:
2005
Page(from):
3791
Page(to):
3794
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499601 [0878499601]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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