Synthesis of Surface Acoustic Wave Filter with Al/ZnO Thin Film Deposited on Silicon Wafer
- Author(s):
- Publication title:
- PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China
- Title of ser.:
- Materials science forum
- Ser. no.:
- 475-479(5)
- Pub. Year:
- 2005
- Page(from):
- 3771
- Page(to):
- 3774
- Pages:
- 4
- Pub. info.:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499601 [0878499601]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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