The Thermal Annealing Effect on the Residual Stress and Mechanical Property in the Compressive Stressed DLC Film

The Thermal Annealing Effect on the Residual Stress and Mechanical Property in the Compressive Stressed DLC Film

Author(s):

Publication title:

PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China

Title of ser.:

Materials science forum

Ser. no.:

475-479(5)

Pub. Year:

2005

Page(from):

3619

Page(to):

3622

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499601 [0878499601]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014239
Series ID:	PA00000012
Conf. info. (Name):	PRICM : Pacific Rim International Conference on Advanced Materials and Processing
Conf. info. (Number):	5th
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2004.11.02-2004.11.05

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