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Modeling and Analyzing on Nonuniformity of Material Removal in Chemical Mechanical Polishing of Silicon Wafer

Author(s):
Su, J. X.
Guo, D. M.
Kang, R. K.
Jin, Z. J.
Li, X. J.
Tian, Y. B.
1 more
Publication title:
Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China
Title of ser.:
Materials science forum
Ser. no.:
471-472
Pub. Year:
2004
Page(from):
26
Page(to):
31
Pages:
6
Pub. info.:
Zurich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499564 [0878499563]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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