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Relationship between Donor Activation and Defect Annealing in 6H-SiC Hot-Implanted with Phosphorus Ions

Author(s):
Ohshima, T.
Uedono, A.
Itoh, H.
Yoshikawa, M.
Kojima, K.
Okada, S.
Nashiyama, I.
Abe, K.
Tanigawa, S.
Frank, T.
Pensl, G.
6 more
Publication title:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999
Title of ser.:
Materials science forum
Ser. no.:
338-342(2)
Pub. date:
2000
Page(from):
857
Page(to):
860
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498543 [0878498540]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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