Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Damage-Free Surface Modification of Hexagonal Silicon Carbide Wafers

Author(s):

Publication title:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

Title of ser.:

Materials science forum

Ser. no.:

338-342(2)

Pub. Year:

2000

Page(from):

845

Page(to):

848

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014227
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials : ICSCRM
Conf. info. (Number):	1999
Conf. info. (Venue):	Research Triangle Park, North Carolina, USA
Conf. info. (Date):	1999.10.10-1999.10.15

Similar Items:

1 Conference Proceedings Dislocation Content of Etch Pits in Hexagonal Silicon Carbide Khlebnikov, Igor I., Lari, Mohsen B., Khlebnikov, Yuri I., Bondokov, Robert T., Ayyagari, Ramakrishna, Muzykov, Peter, … Materials Research Society	7 Conference Proceedings Silicon Carbide Surface Modification by Nitrogen Plasma Expander C.N. Santos, E.M. Marins, M. Machida, É. de Campos, R.P. Mota Trans Tech Publications
2 Conference Proceedings Characterization of Silicon Carbide using Raman Spectroscopy Burton, J. C., Long, F. H., Khlebnikov, Y., Khlebnikov, I., Parker, M., Sudarshan, T. S. Trans Tech Publications	8 Conference Proceedings Performance of Silicon Carbide PiN Diodcs Fabricated on Basal Plane Dislocation-Free Epilayers Zhang, Z.H., Grekov, A.E., Sadagopan, P., Maximenko, S.I., Sudarshan, T.S. Trans Tech Publications
3 Conference Proceedings Imaging of Micropipes in Silicon Carbide Under High Field Stress Gradinaru, G., Helmi, M., Khlebnikov, Y., Korony, G., Mitchel, W. C., Sudarshan, T. S. MRS - Materials Research Society	9 Conference Proceedings Behavior of Particles in the Growth Reactor and their Effect on Silicon Carbide Epitaxial Growth T. Rana, H.Z. Song, M.V.S. Chandrashekhar, T.S. Sudarshan Trans Tech Publications
4 Conference Proceedings Preparation and Evaluation of Damage Free Surfaces on Silicon Carbide Everson, W.J., Heydemann, V.D., Gamble, R.D., Snyder, D.W., Goda, G., Skowronski, M., Grim, J., Berkman, E., Redwing, … Trans Tech Publications	10 Conference Proceedings Initial Stage of Crystallization in the Growth of Silicon Carbide on Substrate with Micropipes Khlebnikov, I. I., Cherednichenko, D. I., Khlebnikov, Y., Sudarshan, T. S. Trans Tech Publications
5 Conference Proceedings Microwave Dielectric Loss Characterization of Silicon Carbide Wafers Bogart, T., Everson, B., Gamble, R.D., Oslosky, E., Snyder, D.W., Furman, E., Perini, S., Lanagan, M. Trans Tech Publications	11 Conference Proceedings Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes Shamsuzzoha, M., Saddow, S. E., Schattner, T. E., Jin, L., Dudley, M., Rendakova, S. V., Dmitriev, V. A. Trans Tech Publications
6 Conference Proceedings Recovery of Silicon and Silicon Carbide Powder from Waste Silicon Wafer Sludge W.T. Kwon, S.R. Kim, Y.H. Kim, J.B. Poudel, S.C. Oh Trans Tech Publications	12 Conference Proceedings Comparison of 4H Silicon Carbide Epitaxial Growths at Various Growth Pressures Using Dicholorosilane and Silane Gases T. Rana, H.Z. Song, M.V.S. Chandrashekhar, T.S. Sudarshan Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12