Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Author(s):

Koh, A.

Publication title:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

Title of ser.:

Materials science forum

Ser. no.:

338-342(1)

Pub. Year:

2000

Page(from):

403

Page(to):

406

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014226
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials : ICSCRM
Conf. info. (Number):	1999
Conf. info. (Venue):	Research Triangle Park, North Carolina, USA
Conf. info. (Date):	1999.10.10-1999.10.15

Similar Items:

1 Conference Proceedings Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer Koh, A., Kestle, A., Dunstan, P. R., Pritchard, M., Wilks, S. P., Pope, G., Mawby, P. A. Trans Tech Publications	7 Conference Proceedings Study of Carbon in Thermal Oxide Formed on 4H-SiC by XPS Zhao, Rusli, P., Xia, J. H., Tan, C. M., Liu, Y., Tin, C. C., Yoon, S. F., Zhu, W. G., Ahn, J. Trans Tech Publications
2 Conference Proceedings A UHV Study of Ni/SiC Schottky Barrier and Ohmic Contact Formation Kestle, A., Wilks, S. P., Dunstan, P. R., Pritchard, M., Pope, G., Koh, A., Mawby, P. A. Trans Tech Publications	8 Conference Proceedings The Impact of Oxygen Flow Rate on the Oxide Thickness and Interface Trap Density in 4H-SiC MOS Capacitors S.M. Thomas, M.R. Jennings, Y.K. Sharma, C.A. Fisher, P.A. Mawby Trans Tech Publications
3 Conference Proceedings Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces, and Sacrificial Oxide Stripped 4H-SiC Surfaces Guy, O.J., Chen, L., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	9 Conference Proceedings Impact of the Oxidation Temperature on the Interface Trap Density in 4H-SiC MOS Capacitors S.M. Thomas, M.R. Jennings, Y.K. Sharma, C.A. Fisher, P.A. Mawby Trans Tech Publications
4 Conference Proceedings Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC Chen, L., Guy, O.J., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	10 Conference Proceedings Ellipsometric and MEIS Studies of 4H-SiC/Si/SiO2 and 4H-SiC/SiO2 Interfaces for MOS Devices O.J. Guy, T.E. Jenkins, M. Lodzinski, A. Castaing, S.P. Wilks, P. Bailey, T.C.Q. Noakes Trans Tech Publications
5 Conference Proceedings The Formation of Low Resistance Ohmic Contacts to 4H-SiC, Circumventing the Need for Post Annealing, Studied by Specific Contact Resistance Measurements and … Guy, O.J., Pope, G., Blackwood, I., Teng, K.S., Lee, W.Y., Wilks, S.P., Mawby, P.A. Trans Tech Publications	11 Conference Proceedings Functional Oxide as an Extreme High-k Dielectric towards 4H-SiC MOSFET Incorporation S.A.O. Russell, M.R. Jennings, T.X. Dai, F. Li, D.P. Hamilton, C.A. Fisher, Y.K. Sharma, P.A. Mawby, A. Pérez-Tomás Trans Tech Publications
6 Conference Proceedings Comparison of Different Surface Pre-Treatments to n-Type 4H-SiC and their Effect on the Specific Contact Resistance of Ni Ohmic Contacts Pope, G., Guy, O., Mawby, P.A. Trans Tech Publications	12 Conference Proceedings SiC Pore Surfaces: Surface Studies of 4H-SiC(1-102) and 4H-SiC(-110-2) Starke, U., Lee, W.Y., Coletti, C., Saddow, S.E., Devaty, R.P., Choyke, W.J. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12