SOL Thinning Effects on 3C-SiC on SOI
- Author(s):
Planes, N. Moller, H. Camassel, J. Stoemenos, Y. Falkovski, L. Eickhoff, M. Krotz, G. - Publication title:
- Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999
- Title of ser.:
- Materials science forum
- Ser. no.:
- 338-342(1)
- Pub. Year:
- 2000
- Page(from):
- 301
- Page(to):
- 304
- Pages:
- 4
- Pub. info.:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878498543 [0878498540]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
3
Conference Proceedings
Structural Characteristics of 3C-SiC Films Epitaxially Grown on the Si/Si3N4/SiO2 System
Trans Tech Publications |
9
Conference Proceedings
Improvement of the Stability in the SiC/SQl System by Nitrogen Implantation
Electrochemical Society |
Trans Tech Publications |
10
Conference Proceedings
Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers
Trans Tech Publications |
5
Conference Proceedings
High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications
Trans Tech Publications |
11
Conference Proceedings
High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |